Industrial-scale Fano resonant nanostructures

In a collaboration with CSEM, we have demonstrated an up-scalable approach for creating Fano-resonant nanostructures on large surfaces at visible wavelengths. The use of processes suitable for high throughput fabrication and the choice of aluminum as a cost-efficient plasmonic material ensure that the presented insights are valuable even in consideration of typical industrial constraints. In particular, wafer-scale fabrication and the process compatibility with roll-to-roll embossing are demonstrated. It is shown that through adjustment of readily accessible evaporation parameters, the shape and position of the optical resonance can be tuned within a spectral band of more than 70 nm. The experimental data are complemented with rigorous coupled wave analysis and surface integral equation simulations. Calculated electric fields as well as surface charges shed light onto the physics behind the present resonances. In particular, a surface plasmon polariton is found to couple to a localized plasmonic mode with a hexapolar charge distribution, leading to a Fanolike resonance. Further understanding of the interactions at hand is gained by considering both aluminum and gold nanostructures.